YieldStar 380G - Metrology & inspection systems - ASML
The YieldStar 380G features faster wavelength switching time and has increased source power combined with a faster sensor, which improves multi-wavelength acquisition move-acquire-measure (MAM) time compared to the YieldStar 375F.
YieldStar 500 – Metrology & inspection systems - ASML
The YieldStar 500 is a stand-alone optical wafer metrology system for measuring pre-etch overlay. Using diffraction-based measurements, it offers fast monitoring of overlay and focus performance directly on produced wafers with nanometer-level accuracy.
YieldStar 1375F - Metrology & inspection systems - ASML
ASML's YieldStar 1375F provides fast, accurate in-product overlay and CD metrology for after-etch process monitoring.
YieldStar: a new metrology platform for advanced lithography …
Apr 1, 2011 · To provide such essential data in a cost-effective manner, ASML developed a metrology platform, called YieldStar. This platform is based on an angle-resolved high-NA scatterometer. It is versatile, as YieldStar's sensor can measure overlay, CD and focus in a …
ASML Holding N.V. (ASML) Stock Price, News, Quote & History - Yahoo Finance
Find the latest ASML Holding N.V. (ASML) stock quote, history, news and other vital information to help you with your stock trading and investing.
YieldStar: a New Metrology Platform for Advanced Lithography Control
Feb 1, 2011 · To provide such essential data in a cost-effective manner, ASML developed a metrology platform, called YieldStar. This platform is based on an angle-resolved high-NA scatterometer. It is...
ASML Develops Predictive Metrology Technology for Semiconductor ...
Jun 1, 2017 · With alignment metrology for every wafer collected with the TWINSCAN system, ASML sought to apply machine learning techniques to estimate overlay metrology for wafers and compare it with existing YieldStar metrology.
YieldStar 1385 – Metrology & inspection systems - ASML
The YieldStar 1385 is a standalone optical wafer metrology system for post-etch overlay measurement of silicon wafers, allowing chipmakers to monitor the performance of their whole semiconductor manufacturing process.
NTS | ASML and NTS's partnership on the YieldStar MMSA
Dec 12, 2023 · The YieldStar is crucial for process control, helping semiconductor manufacturers maintain product quality, reduce defects, and improve yields in the rapidly evolving semiconductor industry, where the demands for smaller, more powerful chips continue to grow.
ASML delivers the first YieldStar 385 system to meet the …
Jan 20, 2021 · In the application business, ASML delivered the first YieldStar 385 system to customers in the fourth quarter. YieldStar 385 has the latest measurement technology to improve the measurement speed and accuracy, which can meet the requirements of 3 nm process.