Light & lasers - Lithography principles| ASML
ASML is pushing the fundamental physical concepts about how light interacts with matter to their absolute limit. From visible blue light to invisible extreme UV light, ASML’s lithography machines keep innovation in light and lasers moving forward.
EUV lithography systems – Products - ASML
Providing high resolution in high-volume manufacturing, ASML’s extreme ultraviolet (EUV) lithography systems are pushing Moore’s Law forward. Discover our NXE systems that use EUV light to deliver high-resolution lithography and make mass production of the world’s most advanced microchips possible.
ASML Holding - Wikipedia
ASML Holding N.V. (commonly shortened to ASML, originally standing for Advanced Semiconductor Materials Lithography) is a Dutch multinational corporation founded in 1984. ASML specializes in the development and manufacturing of photolithography machines which are used to produce computer chips.
Cymer | ASML - Supplying the semiconductor industry
Cymer's product portfolio includes excimer lasers using argon fluoride (ArF) or krypton fluoride (KrF) gases to generate light in the deep-ultraviolet spectrum. These lasers generate the light that photolithography scanners use to image patterns on silicon wafers.
Extreme ultraviolet lithography - Wikipedia
It is a type of photolithography that uses 13.5 nm extreme ultraviolet (EUV) light from a laser-pulsed tin (Sn) plasma to create intricate patterns on semiconductor substrates. As of 2023, ASML Holding is the only company that produces and sells EUV systems for chip production, targeting 5 nanometer (nm) and 3 nm process nodes.
ASML is the only company making the $200 million machines …
Mar 23, 2022 · ASML is the only manufacturer of EUV lithography machines, which revolutionized semiconductors. Here's an inside look at the company relied on by chipmakers.
How does the laser technology in EUV lithography work? - Laser …
Aug 29, 2019 · The next generation (ASML announced the machine as NXE Next) will have an NA of 0.55, enabling a resolution of less than 8 nm. It comprises larger optics, which explains the large and increased efforts at ZEISS SMT.
The $150 Million Machine Keeping Moore’s Law Alive | WIRED
Aug 30, 2021 · Generating EUV light is itself a big problem. ASML’s method involves directing high-power lasers at droplets of tin 50,000 times per second to generate high-intensity light.
Sep 25, 2020 · EUV layers adoption continues to grow to reduce patterning complexity and cost. ASML EUV lithography systems continue to improve on productivity and availability supporting our Logic and DRAM customers roadmap while maintaining, state of the art overlay performance and year on year cost reduction.
ASML | The world's supplier to the semiconductor industry
ASML is the leading supplier to the semiconductor industry, driving lithography system innovation to make chips smaller, faster and greener.